| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable thin film gas sensor with little resistance change even in a long period of pulse driving. SOLUTION: This practical thin film gas sensor with enhanced adhesion and with reduced heater wire breakage is provided by making a noble-metal thin film heater 3 of the sensor have such a structure that a substrate insulation layer and a coating insulation layer are joined via thin film layers mainly composed of at least one element from among Ta, Cr, Ti, etc., (that is, the thin film heat is sandwiched by the thin film layers of Ta, Cr, Ti, etc., and further sandwiched by the substrate insulation layer and the coating insulation layer).
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