| 摘要 |
PROBLEM TO BE SOLVED: To efficiently cool oil for cooling a material to be cooled in a vacuum pump. SOLUTION: Gears 34, 35 are fixed while they mesh each other in protruding end parts of rotary shafts 19, 20 protruding in a gear housing 33. The rotary shafts 19, 20 are rotated in synchronization by the gears 34, 35. A cooling device 50 is attached to a bottom wall 472 of a peripheral wall 47 of the gear housing 33 storing the gears 34, 35. A supplementing material 52 for heat transfer is provided between the cooling device 50 and an outer face of the bottom wall 472. The supplementing material 52 for heat transfer is a pastelike material obtained by mixing copper particulates with grease.
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