| 摘要 |
PROBLEM TO BE SOLVED: To improve adhesion between a metallic thin film as an undercoat layer and a substrate in depositing a graphite nanofiber thin film used for a carbon electron emission source. SOLUTION: A thin film of non-catalytic metal is deposited on a glass substrate or Si substrate into a prescribed pattern, and then a thin film of catalytic metal composed of Fe, Co or alloy containing at least either of these metals is deposited into a prescribed pattern on the above pattern of non-catalytic metal. This substrate is placed in an evacuated vacuum chamber and heated. Then carbon-containing gas and gaseous hydrogen are introduced into the vacuum chamber and pressure inside the chamber is held at about 1 atm to grow graphite nanofibers in the pattern part alone on the substrate by a thermal CVD method. Moreover, before exerting the thermal CVD method, the substrate is heat treated under vacuum. |
