| 摘要 |
PROBLEM TO BE SOLVED: To provide an object processing system in which alignment can be implemented accurately and efficiently during teaching. SOLUTION: A control section determines a reciprocal misalignment, i.e., the misalignment of an alignment substrate when it is reciprocated between a reference table and a mounting table using a transfer mechanism and then returned back, and further determines a one-way misalignment, i.e., the positional shift of an alignment substrate mounted on the mounting table while being aligned accurately when it is transferred onto the reference table by the transfer mechanism. Based on the reciprocal misalignment and the one-way misalignment, the control section corrects the position of the alignment substrate being transferred to the mounting table side by the transfer mechanism. Consequently, alignment can be implemented accurately and efficiently during teaching. |
