| 摘要 |
PROBLEM TO BE SOLVED: To improve the durability of a contact type seal means for a shaft seal preventing the entry of oil into a pump chamber in a vacuum pump. SOLUTION: A part of lubricating oil Y scraped up from a bottom part of a gear storage chamber 331 by the rotation of gears 34, 35 enters remaining spaces 143, 144 from slits 47, 49. The lubricating oil Y entering the remaining spaces 143, 144 lubricates lip seals 44, 45 and cools the lip seal 44 and its peripheral member. The lubricating oil Y lubricating the lip seals 44, 45 and cooling the lip seal 44 and its peripheral member is refluxed in a bottom part of the gear storage chamber 331 through slits 48, 50. |
