| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring method and device, capable of highly accurately and measuring a free-form curved surface at high speed. SOLUTION: In the three-dimensional shape measuring method, by irradiating an object to be inspected 7 and a reference place 5 with a coherent light from a light source 1 and making a feedback light T from the object to be inspect 7 and the reflected light from the reference plane 5 interfere with each other, three-dimensional curved shape of the object to be inspected 7 is obtained. The object to be inspected 7 is irradiated with a light probe to scan the object to be inspected 7, and the object to be inspected 7 is moved in the direction, which intersects the direction of scanning by the light probe to perform two-dimensional scanning and obtain three-dimensional curved surface information on the object to be inspected 7.
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