发明名称 RESIST REMOVER
摘要 PROBLEM TO BE SOLVED: To provide a resist remover not containing hydroxylamine, having superior resist removing performance and causing no corrosion to aluminum alloys and titanium. SOLUTION: The resist remover containing an N-aminated cyclic amine as an essential component is prepared and used.
申请公布号 JP2002116558(A) 申请公布日期 2002.04.19
申请号 JP20000316835 申请日期 2000.10.11
申请人 TOSOH CORP 发明人 HARA YASUSHI
分类号 G03F7/42;H01L21/027;(IPC1-7):G03F7/42 主分类号 G03F7/42
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