| 摘要 |
PROBLEM TO BE SOLVED: To obtain light source equipment that is used in a stepper device for manufacturing a semiconductor, and has a precision with the width of a beam being 10-7 meters. SOLUTION: A light source is obtained from ultraviolet rays with the shortest wavelength, a material without impurities is used for a lens, a prism, and a reflecting mirror, and the lens is machined, so that spherical no aberrations are generated. The lens prism, and reflecting mirror are machined for a long time, and vegetable oil is used as grease oil for protecting machined surfaces. In the case of assembly adjustment, the device is set to a vacuum state, and the periphery is completely shielded for finishing.
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