| 摘要 |
PROBLEM TO BE SOLVED: To provide a casing for a laser device such as that pollutants do not occur even if it is irradiated with a laser beam, its production method, and its method. SOLUTION: This is a method of cleaning casings (19, 21, 27, and 33) for ultraviolet ray laser devices, which removes pollutants adhering to the inside of the casings (19, 21, 27, and 33) by purging the interior of the casings (19, 21, 27, and 33) with inert gas, and applying an F2 cleaning laser beams (16) oscillated from an F2 molecular laser beam applicator (15) to the interior of the casings (19, 21, 27, and 33), in a method of cleaning casings (19, 21, 27, and 33) for ultraviolet ray laser devices wherein laser beams (11) pass.
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