THIN FILM MAGNETIC HEAD AND MAGNETIC DISK RECORDING AND REPRODUCING DEVICE

摘要

PROBLEM TO BE SOLVED: To realize a thin film magnetic head having satisfactory wear resistance and low tackiness. SOLUTION: Fluorine atom of 0.2-3 atom.% is introduced to the uppermost surface of a film of hydrogen containing amorphous carbon or hydrogen containing amorphous silicon carbide (having 5-50% hydrogen content) by treating the surface of a head protecting film in the plasma formed by using a fluorine based gas as a raw material.