发明名称 |
Extreme repetition rate gas discharge laser with improved blower motor |
摘要 |
A gas discharge laser capable of operating at pulse rates in the range of 4,000 Hz to 6,000 Hz at pulse energies in the range of 5 mJ to 10 mJ or greater. Important improvements over prior art designs include: (1) a squirrel cage type fan for producing gas velocities through the discharge region of more than 67 m/s and capable of continuous trouble-free operation for several months, (2) a liquid cooled drive motor having a low loss sealing member separating the motor rotor from the motor starter and protecting the motor from the laser gas and a breach detection device for detecting any breach of the sealing member, (3) a heat exchanger system capable of removing in excess of 16 kw of heat energy from the laser gas and (4) a pulse power system capable of providing precisely controlled electrical pulses to the electrodes needed to produce laser pulses at the desired pulse energies in the range of 5 mJ to 10 mJ or greater at pulse repetition rates in the range of 4,000 Hz to 6,000 Hz or greater.
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申请公布号 |
US2002044587(A1) |
申请公布日期 |
2002.04.18 |
申请号 |
US20000748316 |
申请日期 |
2000.12.22 |
申请人 |
OLIVER I. ROGER;PARTLO WILLIAM N. |
发明人 |
OLIVER I. ROGER;PARTLO WILLIAM N. |
分类号 |
G03F7/20;H01S3/036;H01S3/038;H01S3/04;H01S3/041;H01S3/097;H01S3/0971;H01S3/0975;H01S3/104;H01S3/105;H01S3/1055;H01S3/11;H01S3/134;H01S3/22;H01S3/225;H03K3/57;H03K17/80;(IPC1-7):H01S3/22;H01S3/223 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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