发明名称 Information providing method and system
摘要 Information (e.g., performance and optimal conditions) concerned with an exposure apparatus under conditions (e.g., use conditions and target performance) associated with use of the apparatus is quickly provided to a customer. Customer conditions (210) associated with the user of the exposure apparatus (250) are received from the customer (200) via the Internet (400). Performance simulation software (120) and optimization software (130) obtain the performance and optimal conditions concerning the exposure apparatus (250) under the received customer conditions (210) by using secret apparatus data (110) managed by a service provider. The performance and optimal conditions thus obtained are transmitted to the customer (200) via the Internet (400).
申请公布号 US2002046140(A1) 申请公布日期 2002.04.18
申请号 US20010971648 申请日期 2001.10.09
申请人 KANO ICHIRO;MIZUSHIRI KAORU;OHTAKE MASAHIRO;INA HIDEKI;UTAMURA SHINJI;OGUSHI NOBUAKI;OGURA MASAYA;SUGIMORI TAKASHI 发明人 KANO ICHIRO;MIZUSHIRI KAORU;OHTAKE MASAHIRO;INA HIDEKI;UTAMURA SHINJI;OGUSHI NOBUAKI;OGURA MASAYA;SUGIMORI TAKASHI
分类号 G03F7/20;G06F19/00;G06Q50/00;G06Q50/10;H01L21/027;(IPC1-7):G06F17/60 主分类号 G03F7/20
代理机构 代理人
主权项
地址
您可能感兴趣的专利