USE OF VAPOR-DEPOSITED CONFORMAL COATINGS IN MICROFLUIDIC STRUCTURES
摘要
This invention relates to methods and apparatus for performing microanalytic and microsynthetic analyses and procedures. The invention particularly provides microsystem platforms comprising microfluidics components wherein the interior surfaces of the components comprise a conformal coating of parylene.
申请公布号
WO0187768(A3)
申请公布日期
2002.04.18
申请号
WO2001US15805
申请日期
2001.05.15
申请人
TECAN TRADING AG;SHEPPARD, NORMAN, F., JR.;CARVALHO, BRUCE