发明名称 PROCESS FOR FABRICATING A SEMICONDUCTOR COMPONENT
摘要 In a process for fabricating a semiconductor component, in particular a semiconductor diode, a semiconductor substrate (1) is provided with metal layers (3, 4) in order to form electrode terminals and with passivation (2), and is exposed to particle irradiation (P) in order to adjust the carrier lifetime. This being the case, at least the metal layer (3) on the irradiation side and the passivation (2) are not applied until after the particle irradiation (P). As a result, a continuous defect region (5), which precludes undesired edge effects, is obtained in the semiconductor substrate (1).
申请公布号 US2002045321(A1) 申请公布日期 2002.04.18
申请号 US19990374844 申请日期 1999.08.16
申请人 GALSTER NORBERT;LINDER STEFAN 发明人 GALSTER NORBERT;LINDER STEFAN
分类号 H01L21/322;H01L21/314;H01L21/329;H01L29/861;(IPC1-7):H01L21/822 主分类号 H01L21/322
代理机构 代理人
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