| 发明名称 |
Production of diaphragms |
| 摘要 |
A method of manufacturing a diaphragm utilizing a precision grinding technique after etching a cavity in a wafer. A technique for preventing distortion of the diaphragm based on use of a sacrificial layer of porous silicon is disclosed.
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| 申请公布号 |
US2002045287(A1) |
申请公布日期 |
2002.04.18 |
| 申请号 |
US20010881744 |
申请日期 |
2001.06.18 |
| 申请人 |
RANDOX LABORATORIES LIMITED |
发明人 |
GAMBLE HAROLD S.;MITCHELL S.J. NEIL;PROCHASKA ANDRZEJ;FITZGERALD STEPHEN PETER |
| 分类号 |
B41J2/045;B41J2/055;B41J2/16;B81B3/00;B81C1/00;B81C99/00;H01L21/304;(IPC1-7):H01L21/00 |
主分类号 |
B41J2/045 |
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