Werkwijze voor het vaststellen en automatisch opheffen van faseconflicten op alternerende fasemaskers.

摘要

A method for eliminating phase conflicts that occur in the layout of a phase mask in a localized and automated manner. The method includes a first step in which a set of phase conflicts is completely determined exclusively by using the technical requirements of the design. The first step is an optimum starting point for the following second step for automatically handling and eliminating such conflicts.