发明名称 RETICLE STORAGE SYSTEM
摘要 A reticle storage system (10) includes a reticle rack (16) having a series of lateral slots (58), each for storing a reticle (38). Access to the reticles is provided on a lateral side of the rack. The enclosure (12) has a series of doors (14) for providing access to the reticles in the slots. An air circulation system flows filtered air past the reticles in the rack to prevent contaminants from accumulating on the reticles. The air circulation system is capable of providing positive air pressure within the enclosure with one door open, thereby preventing contaminants from entering the enclosure through the open door.
申请公布号 WO0231597(A1) 申请公布日期 2002.04.18
申请号 WO2001US31818 申请日期 2001.10.12
申请人 R. FOULKE DEVELOPMENT COMPANY, LLC 发明人 FOULKE, RICHARD, F.;FOULKE, RICHARD, F., JR.;OHLENBUSCH, CORD, W.;LUI, TAKMAN
分类号 G03F7/20 主分类号 G03F7/20
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