发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A semiconductor device is provided to effectively connect between an SOI region for an embedded logic device and a bulk region for an embedded memory device. CONSTITUTION: The semiconductor device comprises a single crystalline substrate having a substantially planar surface, a first surface area on the planar surface having a semiconductor-on-insulator region(26), and a second surface area on the planar surface being a single crystalline bulk region(12). Embedded logic devices(82) are formed in the silicon-on-insulator region(26). Also, embedded memory devices are formed in the single crystalline bulk region(12). Preferably, the single crystalline substrate is a silicon wafer.
申请公布号 KR20020029300(A) 申请公布日期 2002.04.18
申请号 KR20010059192 申请日期 2001.09.25
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ADKISSON JAMES W.;DIVAKARUNI RAMACHANDRA;GAMBINO JEFFREY P.;MANDELMAN JACK A.
分类号 H01L27/10;H01L21/8242;H01L21/84;H01L27/108;H01L27/12;(IPC1-7):H01L27/108 主分类号 H01L27/10
代理机构 代理人
主权项
地址