发明名称 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF |
摘要 |
PURPOSE: A semiconductor device is provided to effectively connect between an SOI region for an embedded logic device and a bulk region for an embedded memory device. CONSTITUTION: The semiconductor device comprises a single crystalline substrate having a substantially planar surface, a first surface area on the planar surface having a semiconductor-on-insulator region(26), and a second surface area on the planar surface being a single crystalline bulk region(12). Embedded logic devices(82) are formed in the silicon-on-insulator region(26). Also, embedded memory devices are formed in the single crystalline bulk region(12). Preferably, the single crystalline substrate is a silicon wafer. |
申请公布号 |
KR20020029300(A) |
申请公布日期 |
2002.04.18 |
申请号 |
KR20010059192 |
申请日期 |
2001.09.25 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ADKISSON JAMES W.;DIVAKARUNI RAMACHANDRA;GAMBINO JEFFREY P.;MANDELMAN JACK A. |
分类号 |
H01L27/10;H01L21/8242;H01L21/84;H01L27/108;H01L27/12;(IPC1-7):H01L27/108 |
主分类号 |
H01L27/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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