| 摘要 |
A method for rotating a combdriven device uses application of bias force to controllably rotate the device about one or two axis in response to position measurements of the rotating element. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.
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