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发明名称
RADIKAL-UNTERSTÜTZTE SEQUENTIELLE GASPHASENABCHEIDUNG
摘要
申请公布号
DE1125324(T1)
申请公布日期
2002.04.18
申请号
DE20000913324T
申请日期
2000.02.01
申请人
GENUS, INC.
发明人
SNEH, OFER
分类号
C23C16/44;C23C16/452;C23C16/455;H01L21/285;H01L21/314;H01L21/316;(IPC1-7):H01L21/44;C23C16/00
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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