发明名称 |
Method for treating surface of substrate and surface treatment composition used for the same |
摘要 |
A method for treating the surface of a substrate with a surface treatment composition, wherein the surface treatment composition comprises a liquid medium containing a complexing agent as a metal deposition preventive, the complexing agent comprising at least one member selected from Group A complexing agents and at least one member selected from Group B complexing agents as defined hereinafter.
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申请公布号 |
US2002045556(A1) |
申请公布日期 |
2002.04.18 |
申请号 |
US20000749545 |
申请日期 |
2000.12.28 |
申请人 |
MITSUBISHI CHEMICAL CORPORATION |
发明人 |
MORINAGA HITOSHI;FUJISUE MASAYA |
分类号 |
C11D3/39;C11D7/06;C11D7/26;C11D7/32;C11D7/34;C11D11/00;H01L21/02;H01L21/306;(IPC1-7):C11D1/00 |
主分类号 |
C11D3/39 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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