发明名称 Method for treating surface of substrate and surface treatment composition used for the same
摘要 A method for treating the surface of a substrate with a surface treatment composition, wherein the surface treatment composition comprises a liquid medium containing a complexing agent as a metal deposition preventive, the complexing agent comprising at least one member selected from Group A complexing agents and at least one member selected from Group B complexing agents as defined hereinafter.
申请公布号 US2002045556(A1) 申请公布日期 2002.04.18
申请号 US20000749545 申请日期 2000.12.28
申请人 MITSUBISHI CHEMICAL CORPORATION 发明人 MORINAGA HITOSHI;FUJISUE MASAYA
分类号 C11D3/39;C11D7/06;C11D7/26;C11D7/32;C11D7/34;C11D11/00;H01L21/02;H01L21/306;(IPC1-7):C11D1/00 主分类号 C11D3/39
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