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发明名称
Kristallzüchtungssubstrat
摘要
申请公布号
DE69705458(T2)
申请公布日期
2002.04.18
申请号
DE1997605458T
申请日期
1997.04.21
申请人
SONY CORP., TOKIO/TOKYO;BAIKOWSKI JAPAN CO., LTD.
发明人
MIYAJIMA, TAKAO;BELLEGO, YANN LE;ITO, TAKASHI
分类号
C30B23/02;H01L21/20;H01L33/00;(IPC1-7):C30B23/02;C30B29/40
主分类号
C30B23/02
代理机构
代理人
主权项
地址
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