发明名称 SLEEVE SCANNING APPARATUS OF VERTICAL HANDLER
摘要 PURPOSE: A sleeve scanning apparatus of a vertical handler is provided, which classifies sleeves having remained devices by scanning the remained devices after devices are exhausted from the sleeve for testing. CONSTITUTION: A scanning apparatus(500) comprises a cylinder body(511) installed in parallel with a longitudinal direction of a sleeve(20) when the sleeve is placed on a loading plate(200), and a rodless cylinder(510) comprising a slider(512) which goes to and from on the cylinder body, and a scan sensor(520) scanning whether there are remained devices in the sleeve as being interlocked with the slider by being attached to the slider of the rodless cylinder. And an elevating stay(530) is installed on both sides of the loading plate to increase an empty sleeve(20) to a position where the scan sensor attached to the rodless cylinder scans the empty sleeve when the empty sleeve is placed on the loading plate.
申请公布号 KR20020028657(A) 申请公布日期 2002.04.17
申请号 KR20000059771 申请日期 2000.10.11
申请人 MIRAE CORPORATION 发明人 JUNG, BYEONG IL;KIM, WON;LIM, YONG JIN
分类号 G01R31/26;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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