发明名称 |
Scanning charged-particle microscope |
摘要 |
<p>In orer to supply a scanning charged-particle microscope that can achieve both the improvement of resolution and that of focal depth at the same time, a scanning charged-particle microscope is supplied which is characterized in that a passage aperture 12 for limiting the passage of the charged-particle optical beam 2 is located between the charged-particle source 1 and the scanning deflector 7, and in that a member 126 for limiting the passage of the charged-particle optical beam 2 is provided at least in the center of the passage aperture 12.</p> |
申请公布号 |
EP1197985(A2) |
申请公布日期 |
2002.04.17 |
申请号 |
EP20010120621 |
申请日期 |
2001.08.29 |
申请人 |
HITACHI, LTD. |
发明人 |
ISHITANI, TOHRU;TODOKORO, HIDEO;SATO, MITSUGU |
分类号 |
H01J37/28;H01J37/09;(IPC1-7):H01J37/09 |
主分类号 |
H01J37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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