Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor

摘要

The present invention provides a micro-electro-mechanical system (MEMS) optical device (100). The micro-electro-mechanical system (MEMS) optical device (100) includes a mirror (110) having a substrate (140) with an implanted light reflective optical layer (130) thereover, and a mounting substrate (120) on which the mirror (110) is movably mounted. The inclusion of the dopant (150) within the light reflective optical layer (130) increases the tensile stress of the device (100) and tends to correct the concave curvature of the mirror structure toward a desirably flat configuration. <IMAGE>