INTEGRATED SURFACE MICROMACHINED MAGNETOMETER

摘要

A micromachined magnetometer is built from a rotatable micromachined structure (10) on which is deposited a ferromagnetic material (54) magentized along an axis parallel to the substrate (12). A structure rotatable about the Z-axis can be used to detect external magnetic fields along the X-axis or the Y-axis, depending on the orientation of the magnetic moment of the ferromagnetic material. A structure rotatable about the X-axis or the Y-axis can be used to detect external magnetic fields along the Z-axis. By combining two or three of these structures, a dual-axis or three-axis magnetometer is obtained.