发明名称 Etching using an ink jet print head
摘要 A method is provided for etching a pattern in a material by selectively depositing onto the material droplets of a substance for dissolving or reacting chemically with the material. The droplets may be deposited from a print head of the type having a nozzle from which the material may be ejected as a series of droplets, such as an ink jet print head. In a preferred application, a series of ridges 40 can be etched from an organic insulator layer overlying a photoemissive organic polymer 6. A conductive layer 42 is then deposited and the ridges 40 of organic insulator are dissolved by solvent washing to provide an array of conductive strips which can be used as a cathode for an electroluminescent display device. The print head can also be used to provide by etching a series of ridges of an organic polymer. A transparent conducting polymer is then deposited between the ridges. The ridges are then dissolved by solvent washing to provide an array of strips of the conducting polymer which can be used as an anode in a display device. In combination, both anode and cathode can be fabricated for a display device without the need for photolithography, which is particularly advantageous for the fabrication of large area display devices.
申请公布号 GB2367788(A) 申请公布日期 2002.04.17
申请号 GB20000025342 申请日期 2000.10.16
申请人 * SEIKO EPSON CORPORATION 发明人 TAKEO * KAWASE
分类号 H05B33/10;H01L27/32;H01L51/00;H01L51/40;H01L51/50;H05B33/02;H05B33/12;H05B33/22;(IPC1-7):H01L21/306 主分类号 H05B33/10
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