发明名称 |
Micro-mirror apparatus and production method therefor |
摘要 |
<p>The micro-mirror apparatus of the invention has; a mirror 33, a plurality of torsion springs 35, 36 for supporting the mirror 33 so as to be tiltable relative to an upper substrate 27, a lower substrate 21 arranged facing a lower face of the mirror 33, a convex portion 34 provided on an upper face of the lower substrate 21 and a plurality of lower electrodes 22, 23 formed on an outer face of the convex portion 34. For the torsion spring 36, an aspect ratio of height/width in a cross-section perpendicular to a longitudinal direction thereof is at least 1.8. <IMAGE></p> |
申请公布号 |
EP1197779(A2) |
申请公布日期 |
2002.04.17 |
申请号 |
EP20010402602 |
申请日期 |
2001.10.09 |
申请人 |
NIPPON TELEGRAPH AND TELEPHONE CORPORATION |
发明人 |
SAWADA, RENSHI;HIGURASHI, EIJI;MARUNO, TOHRU |
分类号 |
G02B26/08;(IPC1-7):G02B26/08;B81B3/00 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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