Production process for organic electroluminescent light emitting devices

摘要

A sputtering system with opposite targets is provided, which comprises a pair of targets positioned in parallel opposition to each other with a given space located therebetween, magnetic field generating means for generating a magnetic field in a substantially vertical direction with respect to surfaces of the targets, and shield means located at such positions as to cover portions of the targets except opposite surfaces thereof. A substrate is positioned in opposition to the space between said targets. A given voltage is applied between the targets and the shield means, so that an electrode is provided on an organic EL structure formed on the substrate by sputtering.