METHOD FOR PROCESSING CERAMIC GREEN SHEET AND LASER BEAM MACHINE USED THEREFOR

摘要

PURPOSE: A method for processing a ceramic green sheet is provided to be capable of efficiently forming a plurality of through holes having a required shape and required dimensions at a specific position of the ceramic green sheet. CONSTITUTION: A laser beam(2) is passed through a diffraction grating(4), and spectrally diffracted into a plurality of laser beams(2) so that energy of each diffracted zero dimensional beam becomes more than a processing threshold value of the ceramic green sheet(10). The spectrally diffracted laser beams(2) are reflected with a galvanomirror(5), and the reflected laser beams(2) are individually collected by a condenser lens(7). By irradiating the ceramic green sheet(10) with the collected beams, the ceramic green sheet(10) is prevented from being processed by the diffracted zero dimensional beam and diffracted high dimensional beam, and many through holes of a required shape and required dimensions are simultaneously formed.