发明名称 |
Insulating paste composition for rib formation and method of rib pattern formulation |
摘要 |
An insulating paste composition for rib formation which comprises an insulating material, an organic binder, a light-absorbing substance, and an organic solvent. A rib pattern is formed by sandblasting an insulating layer formed of the composition using a lithographically formed resin pattern mask. The composition forms an antireflective insulating layer which can provide a rib pattern excellent in crosssectional contour and dimensional precision.
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申请公布号 |
US6372292(B1) |
申请公布日期 |
2002.04.16 |
申请号 |
US20000526605 |
申请日期 |
2000.03.16 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
NAKAZATO SYUNJI;SATO HIROMITSU;OBIYA HIROYUKI;NISHIMURA HIROYUKI |
分类号 |
H01L21/304;C08K3/00;C08K5/00;C08L101/00;G02F1/1339;G03F7/00;G03F7/004;G03F7/40;H01B3/10;H01B19/00;H01J9/24;(IPC1-7):B05D1/32 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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