| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating method that can alleviate increase in its thickness of a wet coating film to in the position where the coating begins and in the position where the coating ends. SOLUTION: A wet film alleviated in the phenomenon of increasing in its thickness in the specified positions is formed by approaching the lower end of a slit nozzle to the surface of a platy substrate in the position where the coating begins as illustrated in Fig. (a), running a pump to feed a coating fluid to the surface of the substrate from the lower end of the nozzle to thereby connect the fluid as illustrated in Fig. (b), horizontally moving the nozzle while feeding the fluid as illustrated in Fig. (c), and reversely running the pump to relative descend the nozzle to such the fluid in or just before the position where the coating ends as illustrated in Fig. (d).
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