| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for exposure or a method for evaluating exposure in which evaluation of a sample is simplified by incorporating a procedure for automatically setting the light power-LD emission conditions so that the sample is exposed with an arbitrary exposure energy when it is specified. SOLUTION: The method for exposure comprises a step for determining a light power approximate value of a light emitting means from an arbitrary exposure energy value and a specific expression for calculating a light power approximate value per unit area, a step for determining the light power of the light emitting means when the light is not passed through a filter from the light power approximate value thus determined and the transmittance of the filter, a step for determining emission conditions of the light emitting means from the light power thereof when the light is not passed through a filter and a preset approximate function, a step for determining the number of sheets of filter from the emission conditions thus determined, and a step for exposing the surface of a carrier through a number of sheets of filter thus determined by driving the light emitting means under the emission conditions thus determined.
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