发明名称 PGO solutions for the preparation of PGO thin films via spin coating
摘要 A method of preparing a PGO solution for spin coating includes preparing a 2-methoxyethanol organic solvent; adding Pb(OCH3CO)2.3H2O to the organic solvent at ambient temperature and pressure in a nitrogen-filled glaved box to form Pb in methoxyethanol; refluxing the solution in a nitrogen atmosphere at 150° C. for at least two hours; fractionally distilling the refluxed solution at approximately 150° C. to remove all of the water from the solution; cooling the solution to room temperature; determining the Pb concentration of the solution; adding the 2-methoxyethanol solution to the Pb 2-methoxyethanol until a desired Pb concentration is achieved; combining Ge(OR)4, where R is taken the group of Rs consisting of CH2CH3 and CH(CH3)2, and 2-methoxyethanol; and adding Ge(OR)4 2-methoxyethanol to PbO 2-methoxyethanol to form the PGO solution having a predetermined metal ion concentration and a predetermined Pb:Ge molar ration.
申请公布号 US6372034(B1) 申请公布日期 2002.04.16
申请号 US20000687827 申请日期 2000.10.12
申请人 SHARP LABORATORIES OF AMERICA, INC. 发明人 ZHUANG WEI-WEI;MAA JER-SHEN;ZHANG FENGYAN;HSU SHENG TENG
分类号 H01L21/314;H01L21/316;(IPC1-7):H01L21/22;H01G4/10 主分类号 H01L21/314
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