Microwave excitation gas laser oscillating apparatus

摘要

Based on an oscillation ON/OFF signal and an output state instruction signal output to a high-voltage generating circuit (101) from a power supply control apparatus (301), heater voltage applied from a heater circuit (201) to a heater of a magnetron (2) is controlled depending on whether the magnetron (2) is stopped from oscillating or is continuously or intermittently operating. The heater voltage of the magnetron (2) measured during the intermittent operation is controlled to be higher than that measured during the continuous output and to be lower than that measured while the oscillation is stopped, thereby reducing the change in temperature of the heater and providing a lower limit temperature at which the magnetron (2) can oscillate stably. This configuration increases the service life of the magnetron (2) used for a microwave excitation laser.