发明名称 Method, article and composition for limiting particle aggregation in a mask deposited by a colloidal suspension
摘要 A method, composition, and article for patterning and depositioning a substrate employing a colloidal suspension includes the step of agitating the colloidal suspension to eliminate aggregations of colloidal particles in the substrate. The colloidal suspension may include a plurality of colloidal particles in a suspension medium which may comprise deionized water, a resist such as photoresist, and a solvent.
申请公布号 US6372405(B1) 申请公布日期 2002.04.16
申请号 US20000650476 申请日期 2000.08.29
申请人 MICRON TECHNOLOGY, INC. 发明人 WELLS DAVID H.;HOFMANN JAMES J.
分类号 G03F1/14;(IPC1-7):G03C1/76 主分类号 G03F1/14
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