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发明名称
SUBSTRATER ASSEMBLING APPARATUS
摘要
申请公布号
SG87888(A1)
申请公布日期
2002.04.16
申请号
SG20000001561
申请日期
2000.03.20
申请人
HITACHI TECHNO ENGINEERING CO., LTD.
发明人
SATOSHI YAWATA;KIYOSHI IMAIZUMI;MASAYUKI SAITO;YUKIHIRO KAWASUMI;HARUO MISHINA;AKIRA HIRAI
分类号
G02F1/13;G02F1/133;G02F1/1339;G09F9/30;(IPC1-7):G02F1/13
主分类号
G02F1/13
代理机构
代理人
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