Valveless continuous atmospherically isolated container feeding assembly

摘要

An apparatus for feeding containers of feed material into a process chamber is disclosed. The apparatus is designed to maintain the atmosphere within the process chamber as separate from the atmosphere surrounding the process chamber. The apparatus has a feeder housing having at least two internal seals, which form an airtight seal about the feeding canisters as the canisters are passed through the seals. The seals are separated by a distance less than the length of the container.