| 摘要 |
A method and apparatus for generating a polyatomic form of a prescribed element is disclosed. The apparatus includes a chamber and a plasma source. The plasma source is coupled to the chamber for producing plasma of the prescribed element from a supply of the element in a gaseous state. The plasma includes at least a mixture of single atomic and double atomic species of the prescribed element. Lastly, a quencher is disposed within the chamber proximate an output of the plasma source for facilitating generation of the polyatomic form of the prescribed element from the mixture of single atomic and double atomic species of the prescribed element. In one embodiment, the element is oxygen and the polyatomic form is ozone.
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