SUBSTRATE FOR INK JET HEAD, INK JET HEAD, METHOD FOR MANUFACTURING SUBSTRATE FOR INK JET HEAD, METHOD FOR MANUFACTURING INK JET HEAD, METHOD FOR USING INK JET HEAD AND INK JET RECORDER

摘要

PROBLEM TO BE SOLVED: To provide a substrate for an ink jet head which enables both an ink having high scorching characteristics and an ink having a high corrosion resistance to be used. SOLUTION: A silicon oxide film is formed as a heat storage layer 28 on an Si substrate 23, on which a heating resistor layer 24 and Al layers as electrode wiring lines 22 are formed in respective predetermined patterns. A part of the heating resistor layer 24 present at a gap between a pair of the electrode wiring lines 22 becomes a heating part 21 for heating and boiling an ink of an upper face suddenly. A silicon nitride layer is formed as a protecting film 25 for keeping insulating properties primarily between the electrode wiring lines 22 to cover the heating resistor layer 24 and the electrode wiring lines 22. An amorphous Ta film having a high corrosion resistance to ink as a lower cavitation resistance film 26 and a Ta film having relatively high scorching characteristics as an upper cavitation resistance film 27 are sequentially formed on the silicon nitride layer.