Series and shunt mems RF switch

摘要

A micromechanical electrical systems (MEMS) metallic micromachined electrical switch usable on the die of an integrated circuit and inside the integrated circuit package for controlling radio frequency signal paths while incurring desirably small signal losses. The switch is of the single pole single throw mechanical type with provision for grounding one open-switch position node in the interest of limiting capacitance coupling across the switch in its open condition. Cantilever beam switch element suspension is included along with normally open and normally closed switch embodiments, electrostatic switch actuation and signal coupling through the closed switch by way of capacitance coupling. Low loss radio frequency operation above one gigahertz in frequency is provided.