发明名称 MONITORING A EFFLUENT FROM A CHAMBER
摘要 An effluent monitoring apparatus 10 comprising an energizing cell 22 adapted to receive an effluent, a gas energizer 17 that is capable of energizing the effluent in the cell 22 thereby emitting a radiation, a radiation permeable window 27 that is spaced apart from an interior wall 36 of the 22 cell by a distance d that is sufficiently high to reduce a deposition of effluent residue from the energized gas on the window 27, and a detector 26 to detect the radiation.
申请公布号 SG87924(A1) 申请公布日期 2002.04.16
申请号 SG20010001965 申请日期 2001.03.29
申请人 APPLIED MATERIALS, INC. 发明人 KENNETH TSAI;TUNG BACH;QUYEN PHAM
分类号 B01J19/08;C23C14/00;C23C16/44;H01J37/32;H01L21/02;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32;H01L21/66 主分类号 B01J19/08
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