| 摘要 |
PROBLEM TO BE SOLVED: To make a normal observation by suppressing a current density rise when observed with high magnifying power. SOLUTION: A scanning means 57 scans an energy beam on a sample to avoid duplicated scanning. A sample image signal detecting means 51 detects a sample image signal secondarily emitted from the sample. A frame memory 52 stores the sample image signal with the scanning position of the energy beam used as an address. A readout range setting means 55 sets a readout range on the frame memory 52, based on the magnifying power. A readout means 53 reads the sample image signal in the set readout range and outputs it to a display means 54. The display means 54 displays the scanned image corresponding to the sample image signal in a fixed area regardless of the size of the readout range. |
