| 摘要 |
PURPOSE: An aperture for an exposure apparatus is provided to improve productivity while maintaining an increase of resolution and a depth of focus(DOF), by forming a circular open region in the center of a conventional dipole aperture while not affecting the resolution and DOF. CONSTITUTION: The dipole aperture is of a circular type. An inner pattern(3) of a ring type which is quadrisected is formed in the dipole aperture. One pair of the separated patterns confronting each other supply the first open region(1), and the other pair of the separated patterns supply a shielding region(2) just like regions except the inner pattern. The second open region(4) of a circular type is formed in the center of the inner pattern.
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