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发明名称
摘要
申请公布号	JP3275483(B2)	申请公布日期	2002.04.15
申请号	JP19930266512	申请日期	1993.10.25
申请人		发明人
分类号	H01L29/812;H01L21/205;H01L21/338;(IPC1-7):H01L21/338	主分类号	H01L29/812
代理机构		代理人
主权项
地址

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