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发明名称
摘要
申请公布号	JP3275072(B2)	申请公布日期	2002.04.15
申请号	JP19970308805	申请日期	1997.11.11
申请人		发明人
分类号	H01L29/812;H01L21/338;H01L29/201;H01L29/778;(IPC1-7):H01L21/338	主分类号	H01L29/812
代理机构		代理人
主权项
地址

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