APPARATUS FOR SUPPLYING CHEMICAL LIQUID

摘要

PURPOSE: An apparatus for supplying chemical liquid is provided to accurately figure out how much the chemical liquid is left in a chemical liquid bottle while a supply signal is not supplied, by installing an air bubble detecting sensor and a sub chemical liquid bath. CONSTITUTION: The chemical liquid bottle containing the chemical liquid is mounted in the chemical liquid bath(24). An air bubble detecting unit(26) detects air bubble generated from the chemical liquid bath. A switch unit controls switching of the chemical liquid passing through the air bubble detecting unit, separated from the bubble detecting unit by a predetermined interval. The chemical liquid passing through the switching unit is supplied to a chamber by the sub chemical liquid bath(30). A switch unit controls switching of the chemical liquid passing through the sub chemical liquid bath.