发明名称 A testing device for semiconductor components and a method of using the device
摘要 A testing device for semiconductor components and a method of making the device is described. The testing device includes a support structure having an outer edge, and an adhesive film disposed on the support structure to hold a semiconductor wafer in position on the support structure so that neither the adhesive film nor the semiconductor wafer extends beyond the outer edge of the support structure.
申请公布号 AU8912401(A) 申请公布日期 2002.04.15
申请号 AU20010089124 申请日期 2001.09.18
申请人 MOTOROLA, INC. 发明人 MARK D. NORRIS;JEFFREY S. HUGHES;ROY RUSSELL BROWN
分类号 G01R1/04;G01R31/28;H01L21/68;H01L21/683 主分类号 G01R1/04
代理机构 代理人
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