发明名称 Web-style pad conditioning system and methods for implementing the same
摘要 A system for conditioning a pad is provided. The system includes a pad conditioning media, a feed-roll containing a supply of the pad conditioning media, and a take-up roll for receiving an end of the pad conditioning media. Further included in the system is a pressure application member defined between the feed-roll and the take-up roll. The pressure application member is designed to apply pressure onto the pad conditioning media as the pad conditioning media is applied against the pad to cause a conditioning of a surface of the pad.
申请公布号 AU9468501(A) 申请公布日期 2002.04.15
申请号 AU20010094685 申请日期 2001.09.21
申请人 LAM RESEARCH CORPORATION 发明人 JOH M. BOYD;KATRINA A. MIKHAYLICH
分类号 B24B21/04;B24B53/007;B24B53/017;H01L21/304 主分类号 B24B21/04
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