发明名称 |
Web-style pad conditioning system and methods for implementing the same |
摘要 |
A system for conditioning a pad is provided. The system includes a pad conditioning media, a feed-roll containing a supply of the pad conditioning media, and a take-up roll for receiving an end of the pad conditioning media. Further included in the system is a pressure application member defined between the feed-roll and the take-up roll. The pressure application member is designed to apply pressure onto the pad conditioning media as the pad conditioning media is applied against the pad to cause a conditioning of a surface of the pad. |
申请公布号 |
AU9468501(A) |
申请公布日期 |
2002.04.15 |
申请号 |
AU20010094685 |
申请日期 |
2001.09.21 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
JOH M. BOYD;KATRINA A. MIKHAYLICH |
分类号 |
B24B21/04;B24B53/007;B24B53/017;H01L21/304 |
主分类号 |
B24B21/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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