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发明名称
摘要
申请公布号	JP3274809(B2)	申请公布日期	2002.04.15
申请号	JP19960228663	申请日期	1996.08.29
申请人		发明人
分类号	G01N31/00;G01N1/10;G01N1/36;H01L21/304;(IPC1-7):G01N1/10	主分类号	G01N31/00
代理机构		代理人
主权项
地址

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